Effect of the RF power on the characteristic properties of high-performance silicon nitride single-layer permeation barriers
| Autor: | Lee, Jun S., Sahu, Bibhuti B., Han, Jeon G. |
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| Zdroj: | In Surface & Coatings Technology 25 April 2019 364:63-69 |
| Databáze: | ScienceDirect |
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