Bipolar HiPIMS for tailoring ion energies in thin film deposition
| Autor: | Keraudy, Julien, Viloan, Rommel Paulo B., Raadu, Michael A., Brenning, Nils, Lundin, Daniel, Helmersson, Ulf |
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| Zdroj: | In Surface & Coatings Technology 15 February 2019 359:433-437 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect