Structure, phase evolution, and mechanical properties of DC, pulsed DC, and high power impulse magnetron sputtered Ta–N films
| Autor: | Koller, C.M., Marihart, H., Bolvardi, H., Kolozsvári, S., Mayrhofer, P.H. |
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| Zdroj: | In Surface & Coatings Technology 15 August 2018 347:304-312 |
| Databáze: | ScienceDirect |
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