Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study

Autor: Meng, Fanping, Ge, Fangfang, Chen, Yuyun, Xu, Genbao, Huang, Feng
Zdroj: In Surface & Coatings Technology 15 May 2019 365:2-9
Databáze: ScienceDirect