Blister formation in ZrN/SiN multilayers after He irradiation
| Autor: | Uglov, V.V., Abadias, G., Zlotski, S.V., Kvasov, N.T., Saladukhin, I.A., Malashevih, A.A. |
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| Zdroj: | In Surface & Coatings Technology 25 June 2018 344:170-176 |
| Databáze: | ScienceDirect |
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