β- (Me1, Me2) and MeNx films deposited by magnetron sputtering: Novel heterostructural alloy and compound films

Autor: Musil, J., Kos, Š., Zenkin, S., Čiperová, Z., Javdošňák, D., Čerstvý, R.
Zdroj: In Surface & Coatings Technology 15 March 2018 337:75-81
Databáze: ScienceDirect