β- (Me1, Me2) and MeNx films deposited by magnetron sputtering: Novel heterostructural alloy and compound films
Autor: | Musil, J., Kos, Š., Zenkin, S., Čiperová, Z., Javdošňák, D., Čerstvý, R. |
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Zdroj: | In Surface & Coatings Technology 15 March 2018 337:75-81 |
Databáze: | ScienceDirect |
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