The role of the nitrogen flow rate on the transport properties of CrN thin films produced by DC magnetron sputtering

Autor: Garzon-Fontecha, A., Castillo, H.A., Restrepo-Parra, E., De La Cruz, W.
Zdroj: In Surface & Coatings Technology 25 January 2018 334:98-104
Databáze: ScienceDirect