Kinetics and crystal texture improvements on thin germanium layers obtained by aluminium induced crystallization using oxygen plasma
| Autor: | Pelati, D., Mauguin, O., Largeau, L., Brisset, F., Glas, F., Oehler, F. |
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| Zdroj: | In Surface & Coatings Technology 15 June 2018 343:121-126 |
| Databáze: | ScienceDirect |
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