Fabrication and evaluation of protective SiOx layers using plasma-enhanced chemical vapor deposition
Autor: | Jeong, Hyunju, Cho, Jeadong |
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Zdroj: | In Surface & Coatings Technology 1 December 2017 330:71-76 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Jeong, Hyunju, Cho, Jeadong |
---|---|
Zdroj: | In Surface & Coatings Technology 1 December 2017 330:71-76 |
Databáze: | ScienceDirect |
Externí odkaz: |