Fabrication and evaluation of protective SiOx layers using plasma-enhanced chemical vapor deposition
| Autor: | Jeong, Hyunju, Cho, Jeadong |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 December 2017 330:71-76 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Jeong, Hyunju, Cho, Jeadong |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 December 2017 330:71-76 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect