The role of humidity and oxygen on MoS2 thin films deposited by RF PVD magnetron sputtering
| Autor: | Serpini, Elisabetta, Rota, Alberto, Ballestrazzi, Antonio, Marchetto, Diego, Gualtieri, Enrico, Valeri, Sergio |
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| Zdroj: | In Surface & Coatings Technology 15 June 2017 319:345-352 |
| Databáze: | ScienceDirect |
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