Transient evolution of the target erosion profile during magnetron sputtering: Dependence on gas pressure and magnetic configuration
| Autor: | Nakano, Takeo, Saitou, Yudai, Oya, Kei |
|---|---|
| Zdroj: | In Surface & Coatings Technology 15 October 2017 326 Part B:436-442 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect