Growth, structural and mechanical properties of magnetron-sputtered ZrN/SiNx nanolaminated coatings

Autor: Abadias, G., Uglov, V.V., Saladukhin, I.A., Zlotski, S.V., Tolmachova, G., Dub, S.N., van Vuuren, A. Janse
Zdroj: In Surface & Coatings Technology 25 December 2016 308:158-167
Databáze: ScienceDirect