Atomic layer deposition of aluminum oxide on modified steel substrates
| Autor: | Kukli, Kaupo, Salmi, Emma, Jõgiaas, Taivo, Zabels, Roberts, Schuisky, Mikael, Westlinder, Jörgen, Mizohata, Kenichiro, Ritala, Mikko, Leskelä, Markku |
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| Zdroj: | In Surface & Coatings Technology 25 October 2016 304:1-8 |
| Databáze: | ScienceDirect |
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