Plasma surface fluorination of ultrananocrystalline diamond films
| Autor: | Kulisch, Wilhelm, Voss, Alexandra, Merker, Daniel, Reithmaier, Johann Peter, Merz, Rolf, Kopnarski, Michael, Popov, Cyril |
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| Zdroj: | In Surface & Coatings Technology 25 September 2016 302:448-453 |
| Databáze: | ScienceDirect |
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