Influence of negative bias pulse parameters on accumulation of macroparticles on the substrate immersed in titanium vacuum arc plasma
| Autor: | Ryabchikov, Alexander I., Ananin, Peter S., Sivin, Denis O., Dektyarev, Sergey V., Bumagina, Anna I., Shevelev, Alexey E., Andriyashin, Dmitry A. |
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| Zdroj: | In Surface & Coatings Technology 25 November 2016 306 Part A:251-256 |
| Databáze: | ScienceDirect |
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