Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing
| Autor: | Stepanov, Igor B., Ryabchikov, Alexander I., Ananin, Peter S., Bumagina, Anna I., Shevelev, Alexey E., Shulepov, Ivan A., Sivin, Denis O. |
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| Zdroj: | In Surface & Coatings Technology 25 June 2016 296:20-25 |
| Databáze: | ScienceDirect |
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