Tangential cathode magnetic field and substrate bias influence on copper vacuum arc macroparticle content decreasing
| Autor: | Stepanov, Igor B., Ryabchikov, Alexander I., Ananin, Peter S., Sivin, Denis O., Shevelev, Alexey E., Zhelomsky, Sergei G. |
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| Zdroj: | In Surface & Coatings Technology 25 November 2016 306 Part A:21-24 |
| Databáze: | ScienceDirect |
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