Characteristics of TiN/W2N multilayers prepared using magnetron sputter deposition with dc and pulsed dc powers
| Autor: | Chang, Chi-Lung, Chiou, Tz-Heng, Chen, Pin-Hung, Chen, Wei-Chih, Ho, Chun-Ta, Wu, Wan-Yu |
|---|---|
| Zdroj: | In Surface & Coatings Technology 15 October 2016 303 Part A:25-31 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect