NbTiN thin films deposited by hybrid HiPIMS/DC magnetron co-sputtering
| Autor: | Del Giudice, L., Adjam, S., La Grange, D., Banakh, O., Karimi, A., Sanjinés, R. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 15 June 2016 295:99-106 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect