A reduction–nitridation process of molybdenum films in expanding microwave plasma: Crystal structure of molybdenum nitrides
| Autor: | Jauberteau, Isabelle, Mayet, Richard, Cornette, Julie, Bessaudou, Annie, Carles, Pierre, Jauberteau, Jean-Louis, Merle-Méjean, Thérèse |
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| Zdroj: | In Surface & Coatings Technology 25 May 2015 270:77-85 |
| Databáze: | ScienceDirect |
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