Growth condition of amorphous ZTO films from rotatable targets
| Autor: | Sittinger, V., Pflug, A., Schulz, C., Siemers, M., Melzig, T., Meyer, B., Kronenberger, A., Oberste Berghaus, J., De Bosscher, W. |
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| Zdroj: | In Surface & Coatings Technology 15 April 2015 267:75-80 |
| Databáze: | ScienceDirect |
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