Selective secondary nucleation controlled (001)-texture in boron doped diamond films by increasing the concentrations of tetramethylsilane and trimethylborane

Autor: Zhuang, Hao, Fu, Haiyuan, Jiang, Xin
Zdroj: In Surface & Coatings Technology 25 November 2014 259 Part C:526-531
Databáze: ScienceDirect