Mechanical behavior related to various bonding states in amorphous Si–C–N hard films
| Autor: | Zhuang, Chunqiang, Schlemper, Christoph, Fuchs, Regina, Zhang, Lei, Huang, Nan, Vogel, Michael, Staedler, Thorsten, Jiang, Xin |
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| Zdroj: | In Surface & Coatings Technology 15 November 2014 258:353-358 |
| Databáze: | ScienceDirect |
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