Sputter deposited NbCxNy films: Effect of nitrogen content on structure and mechanical and tribological properties

Autor: Zhang, Kan, Wen, M., Wang, S., Deng, R.P., Gall, D., Zheng, W.T.
Zdroj: In Surface & Coatings Technology 15 November 2014 258:746-753
Databáze: ScienceDirect