Properties of amorphous SiAlON thin films grown by RF magnetron co-sputtering

Autor:	Bernhardt, G.P., Krassikoff, J.I., Sturtevant, B.T., Lad, R.J.
Zdroj:	In Surface & Coatings Technology 15 November 2014 258:1191-1195
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect