Numerical optimization of baffles for sputtering optical precision filters
| Autor: | Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, Michael |
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| Zdroj: | In Surface & Coatings Technology 25 February 2014 241:45-49 |
| Databáze: | ScienceDirect |
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