APCVD of ZnO:Al, insight and control by modeling
| Autor: | van Deelen, J., Illiberi, A., Kniknie, B., Steijvers, H., Lankhorst, A., Simons, P. |
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| Zdroj: | In Surface & Coatings Technology 15 September 2013 230:239-244 |
| Databáze: | ScienceDirect |
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| Autor: | van Deelen, J., Illiberi, A., Kniknie, B., Steijvers, H., Lankhorst, A., Simons, P. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 15 September 2013 230:239-244 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect