Monitoring the microstructure of nanosized palladium layers obtained via thermal and VUV stimulated MOCVD
| Autor: | Kuchumov, B.M., Koretskaya, T.P., Igumenov, I.K., Maksimovskii, E.A., Voronov, Yu.P. |
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| Zdroj: | In Surface & Coatings Technology 15 September 2013 230:266-272 |
| Databáze: | ScienceDirect |
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