PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor
| Autor: | Sulyaeva, V.S., Kosinova, M.L., Rumyantsev, Yu.M., Kesler, V.G., Kuznetsov, F.A. |
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| Zdroj: | In Surface & Coatings Technology 15 September 2013 230:145-151 |
| Databáze: | ScienceDirect |
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