Deposition of rutile (TiO2) with preferred orientation by assisted high power impulse magnetron sputtering

Autor: Stranak, Vitezslav, Herrendorf, Ann-Pierra, Wulff, Harm, Drache, Steffen, Cada, Martin, Hubicka, Zdenek, Tichy, Milan, Hippler, Rainer
Zdroj: In Surface & Coatings Technology 15 May 2013 222:112-117
Databáze: ScienceDirect