Magnetron sputter deposition onto fluidized particle beds
| Autor: | Baechle, Daniel M., Demaree, John D., Hirvonen, James K., Wetzel, Eric D. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 25 April 2013 221:94-103 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Baechle, Daniel M., Demaree, John D., Hirvonen, James K., Wetzel, Eric D. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 25 April 2013 221:94-103 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect