In-line deposition of silicon-based films by hot-wire chemical vapor deposition
| Autor: | Schäfer, Lothar, Harig, Tino, Höfer, Markus, Laukart, Artur, Borchert, Dietmar, Keipert-Colberg, Sinje, Trube, Jutta |
|---|---|
| Zdroj: | In Surface & Coatings Technology 25 January 2013 215:141-147 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect