Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition

Autor: Endler, Ingolf, Höhn, M., Schmidt, J., Scholz, S., Herrmann, M., Knaut, M.
Zdroj: In Surface & Coatings Technology 25 January 2013 215:133-140
Databáze: ScienceDirect