Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modification
| Autor: | Ueda, M. a, ⁎, Oliveira, R.M. a, Rossi, J.O. a, Mello, C.B. a, b, Rangel, Rita C.C. c, Vieira, M.S. a |
|---|---|
| Zdroj: | In Surface & Coatings Technology 25 August 2013 229:97-104 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect