Influence of the residual stress on the nanoindentation-evaluated hardness for zirconiumnitride films

Autor: Meng, Q.N., Wen, M., Hu, C.Q., Wang, S.M., Zhang, K., Lian, J.S., Zheng, W.T.
Zdroj: In Surface & Coatings Technology 15 March 2012 206(14):3250-3257
Databáze: ScienceDirect