Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering
| Autor: | Lin, Jianliang, Zhang, Niingyi, Wu, Zhili, Sproul, William D., Kaufman, Michael, Lei, Mingkai, Moore, John J. |
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| Zdroj: | In Surface & Coatings Technology 15 August 2013 228 Supplement 1:S601-S606 |
| Databáze: | ScienceDirect |
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