On surface temperatures during high power pulsed magnetron sputtering using a hot target
| Autor: | Tesař, J., Martan, J., Rezek, J. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2011 206(6):1155-1159 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Tesař, J., Martan, J., Rezek, J. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2011 206(6):1155-1159 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect