CFx thin solid films deposited by high power impulse magnetron sputtering: Synthesis and characterization
| Autor: | Schmidt, S., Greczynski, G., Goyenola, C., Gueorguiev, G.K., Czigány, Zs., Jensen, J., Ivanov, I.G., Hultman, L. |
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| Zdroj: | In Surface & Coatings Technology 15 November 2011 206(4):646-653 |
| Databáze: | ScienceDirect |
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