Micro-patterning of Si(100) surfaces by ethanol cluster ion beams
| Autor: | Takaoka, Gikan H., Ryuto, Hiromichi, Ozaki, Ryosuke, Mukai, Hiroshi, Takeuchi, Mitsuaki |
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| Zdroj: | In Surface & Coatings Technology 2011 206(5):869-873 |
| Databáze: | ScienceDirect |
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