Development and irradiation performance of stencil masks for heavy-ion patterned implantation
| Autor: | Zheng, B., Iketa, N., Sato, K., Sato, R., Song, M., Takeda, Y., Amekura, H., Oyoshi, K., Kono, K., Ila, D., Kishimoto, N. |
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| Zdroj: | In Surface & Coatings Technology 2011 206(5):806-811 |
| Databáze: | ScienceDirect |
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