Nanoscale friction of partially oxidized silicon nitride thin films
| Autor: | Filla, J., Aguzzoli, C., Sonda, V., Farias, M.C.M., Soares, G.V., Baumvol, I.J.R., Figueroa, C.A. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 25 June 2011 205(19):4528-4531 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect