Permeation barrier coatings by inductively coupled plasma CVD on polycarbonate substrates for flexible electronic applications
Autor: | Lay, Eddy a, Wuu, Dong-Sing b, e, ⁎, Lo, Shih-Yung b, Horng, Ray-Hua a, c, Wei, Hsiao-Fen d, Jiang, Liang-You d, Lee, Hung-Uang d, Chang, Yu-Yang d |
---|---|
Zdroj: | In Surface & Coatings Technology 2011 205(17):4267-4273 |
Databáze: | ScienceDirect |
Externí odkaz: |