Comparison of pulsed dc and rf hollow cathode depositions of Cr and CrN films
| Autor: | Baránková, H., Bárdos, L. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2011 205(17):4169-4176 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Baránková, H., Bárdos, L. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2011 205(17):4169-4176 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect