Pretreatment of glass substrates by Ar/O2 ion beams for the as-sputtered rough Al doped zinc oxide thin films

Autor: Zhang, Wendi, Bunte, Eerke, Luysberg, Martina, Spiekermann, Philipp, Ruske, Florian, Hüpkes, Jürgen
Zdroj: In Surface & Coatings Technology 25 July 2011 205 Supplement 2:S223-S228
Databáze: ScienceDirect