Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge

Autor:	Wang, Z.J., Tian, X.B., Gong, C.Z., Shi, J.W., Yang, S.Q., Fu, Ricky K.Y., Chu, Paul K.
Zdroj:	In Surface & Coatings Technology
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect