Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge
| Autor: | Gong, C.Z., Zhu, Z.T., Shi, J.W., Yang, S.Q., Tian, X.B., Chu, P.K. |
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| Zdroj: | In Surface & Coatings Technology 2010 204(18):2996-2998 |
| Databáze: | ScienceDirect |
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