Effect of carbon implantation on visible luminescence and composition of Si-implanted SiO 2 layers
| Autor: | Tetelbaum, D.I., Mikhaylov, A.N., Vasiliev, V.K., Belov, A.I., Kovalev, A.I., Wainstein, D.L., Mendeleva, Yu.A., Finstad, T.G., Foss, S., Golan, Y., Osherov, A. |
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| Zdroj: | In Surface & Coatings Technology 2009 203(17):2658-2663 |
| Databáze: | ScienceDirect |
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