The effect of methane dose and post annealing treatment on the formation of nano β-SiC buried layer in the silicon
| Autor: | Dibaji, H., Larijani, M.M., Novinrooz, A., Salehkootahi, M., Afzalzadeh, R., Noroozian, Sh. |
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| Zdroj: | In Surface & Coatings Technology 2009 203(17):2514-2520 |
| Databáze: | ScienceDirect |
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