Comparison and combination of several stress relief methods for cubic boron nitride films deposited by ion beam assisted deposition
| Autor: | Fan, Y.M., Zhang, X.W., You, J.B., Tan, H.R., Chen, N.F. |
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| Zdroj: | In Surface & Coatings Technology 2009 203(10):1452-1456 |
| Databáze: | ScienceDirect |
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