Surface morphology and mechanical properties of nanoscale TiAlN/SiN x multilayer coating deposited by reactive magnetron sputtering
| Autor: | Sakurai, Masatoshi, Toihara, Takaomi, Wang, Mei, Kurosaka, Wataru, Miyake, Shojiro |
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| Zdroj: | In Surface & Coatings Technology 2008 203(1):171-179 |
| Databáze: | ScienceDirect |
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